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An ultrahigh vacuum system for the scattering of keV ions by a clean silicon(100) surface.

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University of Ottawa (Canada)

Abstract

An ultrahigh vacuum surface physics system was designed and built to study ion-surface interactions at various incident angles by detection of the forward scattered particles. The proposed initial measurement is the scattering of keV ions by a clean Si(100) surface.

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Source: Masters Abstracts International, Volume: 30-03, page: 0774.

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