Precise motion with piezoelectric actuator.

dc.contributor.advisor	Necsulescu, D.,
dc.contributor.author	Giurgea, Constantin.
dc.date.accessioned	2009-03-23T13:03:55Z
dc.date.available	2009-03-23T13:03:55Z
dc.date.created	2002
dc.date.issued	2002
dc.degree.level	Masters
dc.degree.name	M.A.Sc.
dc.description.abstract	The purpose of this study is to determine the displacement performance of a high accuracy-positioning device equipped with three piezo ceramic actuators. The displacement performance of each individual actuator is investigated in order to perform controlled motion over a very small range. A nanometric precision three-degrees of freedom positioner was designed and fabricated. In order to design a proper closed-loop controller, the open loop characteristics of the nanopositioner were experimentally investigated.
dc.format.extent	186 p.
dc.identifier.citation	Source: Masters Abstracts International, Volume: 41-05, page: 1504.
dc.identifier.isbn	9780612765832
dc.identifier.uri	http://hdl.handle.net/10393/6184
dc.identifier.uri	http://dx.doi.org/10.20381/ruor-14732
dc.publisher	University of Ottawa (Canada)
dc.subject.classification	Engineering, Mechanical.
dc.title	Precise motion with piezoelectric actuator.
dc.type	Thesis

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