Proceedings of the 21st Canadian Semiconductor Science and Technology Conference

Abstract

These are the official proceedings of the 21st Canadian Semiconductor Science and Technology Conference, held at the University of Ottawa, Ottawa, Canada, from August 25 to 27, 2026. The proceedings include welcome messages, committee information, sponsor and exhibitor acknowledgements, award recipients, as well as abstracts of keynote, plenary, invited and contributed presentations from researchers representing universities, government laboratories, and industry. Topics cover semiconductor science and technology broadly, including epitaxy, materials, characterization, electronic, sensors, solar, photonics, micro-electromechanical systems, low dimension, quantum, nano, organic semiconductors and additive manufacturing. The volume serves as a permanent archival record of the conference and its scientific contributions.