Microfabrication of Plasmonic Device: PPBG BIosensor in Cytop, Reflection Itensity Modulator and Atomically Flat Nanohole Array

Abstract

This thesis details the fabrication of three different plasmon-polariton based devices: a plasmon-polariton Bragg grating (PPBG) biosensor, an intensity modulator incorporating grating couplers, and optically separated electrical contact, and finally an array of nanoholes in an ultrasmooth Au film. The biosensor involves a 35 nm Au stripe, lithographically stepped in width to produce a Bragg reflector. The waveguide is embedded in symmetric, Cytop claddings 8 µm thick. Channels are etched into the top cladding, exposing the waveguides and allowing for the integration of fluidics. The modulator involves a 20 nm Au pad, overlaid with 80 nm Au diffraction gratings, supported by an ultrathin (~3 nm) SiO2 insulator, on a p-doped Silicon wafer backed by an Al Ohmic contact. Electrical contact pads are separated from the waveguide by a thick dielectric (700 nm PMMA), and 2.5 µm vias in-filled with Au allow for electrical connection between the contact pads and waveguides. The nanohole array is machined by focused ion beam into an ultrasmooth Au film revealed by template stripping. The Au film is stacked on a thick film of Cytop between ~5 µm thick.