The use of acid-sensitive dyes to monitor acid generation and diffusion in thin polymer films.

Abstract

For purposes of understanding the diffusion behavior, we have developed the dyes and the basic knowledge that will allow the monitoring of acid diffusion in thin polymer films. We believe that fluorescence spectroscopy is the suitable tool for this purpose and have used acid-sensitive probes to monitor the presence of acid in thin polymer films. The three categories of compounds that were used were: (1) aromatic monoazines; 2-phenylpyridine, 2-phenylquinoline, and acridine, (2) xanthene dyes; fluorescein and rhodamine B base, and (3) various benzothiazole derivatives. The three main objectives of this part of the research were to choose the most appropriate sensors, observe images through fluorescence microscopy and study the feasibility of monitoring diffusion through fluorescence spectroscopy. The second part of this research also dealt with photoacid generation studies in thin polymer films. In this part of the research, an in situ method for quantifying acid-generation in photoresist sample was developed. In the last part of this thesis, the toxicological properties of some of the components that are used to manufacture the photoresist compounds were reviewed. (Abstract shortened by UMI.)