Fabrication of surface plasmon waveguide devices in CYTOP with microfluidic channels

Title: Fabrication of surface plasmon waveguide devices in CYTOP with microfluidic channels
Authors: Chiu, Charles
Date: 2010
Abstract: Long Range Surface Plasmon Polariton (LRSPP) waveguide biosensors were fabricated and optically characterized. The topology comprised of thin (35 nm) Au stripe waveguide devices embedded in thick (∼18 mum) CYTOP claddings. Patterned regions of the Au surface were exposed from its top cladding through O2 plasma etching. The etched CYTOP cavity acted as mircofluidic channels for containment of index-matched sensing fluid. The fabrication process was documented and examined for dimension and structure/surface profiles. The presented data and figures are: optical index measurements, thickness measurements, microscope images, SEM images, and AFM profiles. Optical characterizations were performed on full CYTOP cladded and half cladded, channel-filled straight waveguides. LRSPP modes were excited through end-fire coupling with fiber-optics. The measured propagation losses were 6.33 dB/mm and 10.46 dB/mm respectively. The results deviated from the simulated value of 7.2 dB/mm and were suspected to originate from material and structure properties of CYTOP.
URL: http://hdl.handle.net/10393/28516
CollectionTh├Ęses, 1910 - 2010 // Theses, 1910 - 2010
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