A feasibility study of the application of ion and electron beams to semi-conductor device fabrication.

Hayes, R. E.2009-03-232009-03-2319701970Source: Masters Abstracts International, Volume: 40-07, page: .http://hdl.handle.net/10393/6992http://dx.doi.org/10.20381/ruor-11563Engineering, General.A feasibility study of the application of ion and electron beams to semi-conductor device fabrication.Thesis