Necsulescu, D.,Giurgea, Constantin.2009-03-232009-03-2320022002Source: Masters Abstracts International, Volume: 41-05, page: 1504.9780612765832http://hdl.handle.net/10393/6184http://dx.doi.org/10.20381/ruor-14732The purpose of this study is to determine the displacement performance of a high accuracy-positioning device equipped with three piezo ceramic actuators. The displacement performance of each individual actuator is investigated in order to perform controlled motion over a very small range. A nanometric precision three-degrees of freedom positioner was designed and fabricated. In order to design a proper closed-loop controller, the open loop characteristics of the nanopositioner were experimentally investigated.186 p.Engineering, Mechanical.Thesis