An analysis of a Duoplasmatron ion source for ion beam deposition.

Tsai, Chin-Chi.2009-03-232009-03-2319681968Source: Masters Abstracts International, Volume: 40-07, page: .http://hdl.handle.net/10393/7271http://dx.doi.org/10.20381/ruor-11695Engineering, General.An analysis of a Duoplasmatron ion source for ion beam deposition.Thesis